Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision

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Fältnamn	Indikatorer	Metadata
000		05837naa a2200589 4500
001		oai:DiVA.org:ri-39055
003		SwePub
008		190626s2019 \| \|\|\|\|\|\|\|\|\|\|\|000 \|\|eng\|
009		oai:DiVA.org:umu-165111
024	7	a https://urn.kb.se/resolve?urn=urn:nbn:se:ri:diva-390552 URI
024	7	a https://doi.org/10.1116/1.50908602 DOI
024	7	a https://urn.kb.se/resolve?urn=urn:nbn:se:umu:diva-1651112 URI
040		a (SwePub)rid (SwePub)umu
041		a engb eng
042		9 SwePub
072	7	a ref2 swepub-contenttype
072	7	a art2 swepub-publicationtype
100	1	a Silander, Isak,d 1980-u Umeå universitet,Institutionen för fysik,Umeå University, Sweden4 aut0 (Swepub:umu)issi0002
245	1 0	a Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision
264	1	b AVS Science and Technology Society,c 2019
338		a print2 rdacarrier
500		a Funding details: Kempestiftelserna, 1823; Funding text 1: This research was in part supported by the EMPIR initiative (No. 14IND06), which is cofounded by the European Union’s Horizon 2020 research and innovation program and the EMPIR Participating States; the Swedish Research Council (VR), Project No. 621-2015-04374; the Umeå University Industrial doctoral school (IDS); the Vinnova Metrology Programme, Project Nos. 2015-0647 and 2014-06095; and the Kempe Foundations, Project No. 1823, U12. The authors are also indebted to Magnus Holmsten at RISE for calibrating the temperature sensors.
520		a Gas modulation refractometry (GAMOR) is a methodology that, by performing repeated reference assessments with the measurement cavity being evacuated while the reference cavity is held at a constant pressure, can mitigate drifts in dual Fabry-Perot cavity based refractometry. A novel realization of GAMOR, referred to as gas equilibration GAMOR, that outperforms the original realization of GAMOR, here referred to as single cavity modulated GAMOR (SCM-GAMOR), is presented. In this, the reference measurements are carried out by equalizing the pressures in the two cavities, whereby the time it takes to reach adequate conditions for the reference measurements has been reduced. This implies that a larger fraction of the measurement cycle can be devoted to data acquisition, which reduces white noise and improves on its short-term characteristics. The presented realization also encompasses a new cavity design with improved temperature stabilization and assessment. This has contributed to improved long-term characteristics of the GAMOR methodology. The system was characterized with respect to a dead weight pressure balance. It was found that the system shows a significantly improved precision with respect to SCM-GAMOR for all integration times. For a pressure of 4303 Pa, it can provide a response for short integration times (up to 10 min) of 1.5 mPa (cycle)1/2, while for longer integration times (up to 18 h), it shows an integration time-independent Allan deviation of 1 mPa (corresponding to a precision, defined as twice the Allan deviation, of 0.5 ppm), exceeding the original SCM-GAMOR system by a factor of 2 and 8, respectively. When used for low pressures, it can provide a precision in the sub-mPa region; for the case with an evacuated measurement cavity, the system provided, for up to 40 measurement cycles (ca. 1.5 h), a white noise of 0.7 mPa (cycle)1/2, and a minimum Allan deviation of 0.15 mPa. It shows a purely linear response in the 2.8-10.1 kPa range. This implies that the system can be used for the transfer of calibration over large pressure ranges with exceptional low uncertainty. © 2019 Author(s).
650	7	a TEKNIK OCH TEKNOLOGIERx Elektroteknik och elektronikx Annan elektroteknik och elektronik0 (SwePub)202992 hsv//swe
650	7	a ENGINEERING AND TECHNOLOGYx Electrical Engineering, Electronic Engineering, Information Engineeringx Other Electrical Engineering, Electronic Engineering, Information Engineering0 (SwePub)202992 hsv//eng
650	7	a NATURVETENSKAPx Fysikx Atom- och molekylfysik och optik0 (SwePub)103022 hsv//swe
650	7	a NATURAL SCIENCESx Physical Sciencesx Atom and Molecular Physics and Optics0 (SwePub)103022 hsv//eng
653		a Data acquisition
653		a Fabry-Perot interferometers
653		a Integration
653		a Modulation
653		a Allan deviation
653		a Constant pressures
653		a Fabry-Perot cavity
653		a Integration time
653		a Linear response
653		a Pressure balance
653		a Reference measurements
653		a Temperature stabilization
653		a White noise
700	1	a Hausmaninger, Thomas,d 1987-u Umeå universitet,Institutionen för fysik,National Metrology Institute VTT MIKES, Finland,Umeå University, Sweden; VTT, Finland4 aut0 (Swepub:umu)thha0038
700	1	a Forssén, Claytonu Umeå universitet,Institutionen för fysik,Umeå University, Sweden4 aut0 (Swepub:umu)clfo0003
700	1	a Zelan, Martinu RISE,Mätteknik4 aut0 (Swepub:ri)MartinZe@ri.se
700	1	a Axner, Oveu Umeå universitet,Institutionen för fysik,Umeå University, Sweden4 aut0 (Swepub:umu)ovax0001
710	2	a Umeå universitetb Institutionen för fysik4 org
773	0	t Journal of Vacuum Science and Technology Bd : AVS Science and Technology Societyg 37:4q 37:4x 2166-2746x 2166-2754
856	4	u https://doi.org/10.1116/1.5090860y Fulltext
856	4	u https://avs.scitation.org/doi/pdf/10.1116/1.5090860
856	4	u https://umu.diva-portal.org/smash/get/diva2:1369973/FULLTEXT01.pdfx primaryx Raw objecty fulltext:print
856	4 8	u https://urn.kb.se/resolve?urn=urn:nbn:se:ri:diva-39055
856	4 8	u https://doi.org/10.1116/1.5090860
856	4 8	u https://urn.kb.se/resolve?urn=urn:nbn:se:umu:diva-165111

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