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  • Hedsten, Karin,1964Chalmers tekniska högskola,Chalmers University of Technology (author)

MEMS-based VCSEL beam steering using replicated polymer diffractive lens

  • Article/chapterEnglish2008

Publisher, publication year, extent ...

  • Elsevier BV,2008

Numbers

  • LIBRIS-ID:oai:research.chalmers.se:48e63df5-f9f5-46fc-a55c-e879c3d8dc86
  • https://doi.org/10.1016/j.sna.2006.12.015DOI
  • https://research.chalmers.se/publication/68121URI
  • https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-95122URI

Supplementary language notes

  • Language:English
  • Summary in:English

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Classification

  • Subject category:art swepub-publicationtype
  • Subject category:ref swepub-contenttype

Notes

  • Abstract. This paper describes a fully integrated micro-optical system, in which dynamic angular control of the beam from a VCSEL (vertical cavity surface emitting laser) is realized by laterally moving a collimat¬ing diffractive lens in the light path. The lens is mounted on a translatable silicon stage, which consists of a frame with an opening for the light to traverse the lens and electro-statically driven comb actuators, by which the lateral movement is achieved. Devices implementing both 1D and 2D scanning have been fabricated and evaluated. Integration of the lens onto the translatable silicon stage is done using a newly developed fabrication process based on hot embossing of an amorphous fluorocarbon polymer. This fabrication process relies on a reversed-order protocol, where the structuring of the optical element precedes the silicon microstructuring. Assembly and packaging of the VCSEL-MOEMS system, using LTCC (low temperature cofired ceramic) technique, is also demonstrated. Optical evaluation of the system and beam steering function shows significant beam deflection for a relatively low driving voltage (~70 V).

Subject headings and genre

Added entries (persons, corporate bodies, meetings, titles ...)

  • Melin, Jonas,2005Uppsala universitet,Mikrostrukturteknik (author)
  • Bengtsson, Jörgen,1968Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)jorgenb (author)
  • Modh, Peter,1968Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)modh (author)
  • Karlén, David,1979Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)f98daka (author)
  • Löfving, Björn,1970(Swepub:cth)xlofbj (author)
  • Nilsson, Richard (author)
  • Rödjegård, Henrik,1974 (author)
  • Persson, Katrin (author)
  • Enoksson, Peter,1957Chalmers tekniska högskola,Chalmers University of Technology(Swepub:cth)enok (author)
  • Nikolajeff, FredrikUppsala universitet,Mikrostrukturteknik(Swepub:uu)fni28025 (author)
  • Andersson, G. (author)
  • Chalmers tekniska högskolaMikrostrukturteknik (creator_code:org_t)

Related titles

  • In:Sensors and Actuators, A: Physical: Elsevier BV142:1, s. 336-3450924-42471873-3069

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