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Initial stages of metal-organic chemical-vapor deposition of ZrO2 on a FeCrAl alloy

Grehk, Mikael (author)
Högskolan Dalarna,Materialvetenskap
Engkvist, Josefin (author)
Högskolan Dalarna,Materialteknik
Bexell, Ulf (author)
Högskolan Dalarna,Materialvetenskap
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Richter, J. H. (author)
Uppsala universitet,Fysiska institutionen
Karlsson, P. G. (author)
Uppsala universitet,Fysiska institutionen
Sandell, A. (author)
Uppsala universitet,Fysiska institutionen
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 (creator_code:org_t)
Amsterdam : Elsevier BV, 2008
2008
English.
In: Thin Solid Films. - Amsterdam : Elsevier BV. - 0040-6090 .- 1879-2731. ; 516:6, s. 875-879
  • Journal article (peer-reviewed)
Abstract Subject headings
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  • The initial stages of metal-organic chemical-vapor deposition of ZrO2 on a model FeCrAl alloy was investigated using synchrotron radiation photoelectron spectroscopy, X-ray absorption spectroscopy, scanning Auger microprobe, and time of flight secondary mass spectrometry. The coatings were grown in ultra-high vacuum at 400 degrees C and 800 degrees C using the single source precursor zirconium tetra-tert-butoxide. At 400 degrees C the coatings mainly consist of tetragonal ZrO2 and at 800 degrees C a mixed ZrO2/Al2O3 layer is formed. The Al metal diffuses from the FeCrAl bulk to the metal/coating interface at 400 degrees C and to the surface of the coating at 800 degrees C. The result indicates that the reaction mechanism of the growth process is different at the two investigated temperatures.

Subject headings

NATURVETENSKAP  -- Fysik (hsv//swe)
NATURAL SCIENCES  -- Physical Sciences (hsv//eng)
TEKNIK OCH TEKNOLOGIER  -- Materialteknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Materials Engineering (hsv//eng)

Keyword

metal-organic chemical-vapor deposition (MOCVD)
zirconium tetra-tert-butoxide (ZTB)
zirconium oxide
FeCrAl-alloy
time of flight secondary ion mass spectrometry (ToF-SIMS)
X-ray photoelectron spectroscopy (XPS)
X-ray absorption spectroscopy (XAS)
Physics
Fysik

Publication and Content Type

ref (subject category)
art (subject category)

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