L773:1520 8559 OR L773:0734 2101
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Tin oxide atomic layer deposition from tetrakis(dimethylamino)tin and water
- Mullings, Marja N. (author)
-
- Hägglund, Carl, 1975- (author)
- Department of Chemical Engineering, Stanford University, Stanford, California,Thin film solar cells
- Bent, Stacey F. (author)
- (creator_code:org_t)
- American Vacuum Society (AVS), 2013
- 2013
- English.
- In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society (AVS). - 0734-2101 .- 1520-8559. ; 31
- Journal article (peer-reviewed)
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- TEKNIK OCH TEKNOLOGIER -- Materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering (hsv//eng)
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- ref (subject category)
- art (subject category)
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- Uppsala University
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